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세라믹 압력센서 원리 - selamig ablyeogsenseo wonli

1 년도s ~ 전에
코멘트: 0
견해: 66

특징
1,높은 정확성과 높은 안정성
2,측정 범위 의 넓은 선택
3,단단한 세라믹 민감한 다이어프램
4,스마트 볼륨, 캡슐화 쉽게
5,뛰어난 충격 및 진동 저항
6,우수한 내식성 과 내마모성
7,저가, 극도의 광범위한 적용 범위
8,열 보상, 넓은 범위의 작동 온도

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설명
PS100 시리즈 세라믹 압력 센서 (MV) 의 출력은세라믹 재료 의 Al2O3 으로 이루어지는건식 세라믹 압전 저항 압력 센서 인 96% 특별한 기술 로, 압전 저항 원리 다음 작업, 휘트 스톤 브리지 는 하나의 세라믹 다이어프램 측과 다이아 프램 에 직접 인쇄 화면입니다’ 반대측 는 측정 유체에 직접 노출 될 수있다. 세라믹 은 높은 탄성인식 소재, 부식 및 마모 저항, 강한 충격 및 진동 저항, 추가 보호 는 일반적으로 필요하지 않습니다, 및열 안정성 은 -40 ~ 125 의 동작 온도 까지 만들 수ºC.

PS100 시리즈는 치수가 작은특징 을 가지고, 18 mm 직경, 6.35 mm의 두께,  2~ 400bar 범위, 고성능 - 가격 비율, 널리 다양한 압력 계기로 측정 에 사용 된. 일반적인 응용 프로그램: 공정 제어, 환경 제어, 유압 및 공압 장치, 서보 밸브 및 드라이브, 화학 제품, 화학 산업, 의료 기기, 및 기타 분야.

매개 변수

센서 형식 계량기
자료 세라믹 알2O3 96%

권력 공급

3VDC | 5VDC | 12VDC | 24VDC

브리지 저항

11케이±20%

압력 범위

0~ 2Bar ... 400Bar

응답 시간

<1MS
결합 정확성
0.2%(선형성,히스테리시스,반복성)
제로 출력
0±0.225 @ MV 는 / VºC
감광도
2.0~ 4.8mV / V
온도 특성
±0.02%FS /ºC (25ºC ~ 85&ordC;C)
안정
<0.2%FSO / 년
작동 온도
-40~ (125)ºC
절연
>2KV
치수
18*6.35MM
무게
5G

일반적인 압력 (바)

정격 범위

2

5

10

20

30

50

100

200

400

위에 압력

4

10

20

40

60

100

200

400

600

버스트 압력

7

15

35

70

90

150

250

450

600

*명세서 제목 에 변화 없이 통지, the 최근 날짜 시트 하십시오 접촉:

도면

세라믹 압력센서 원리 - selamig ablyeogsenseo wonli

*명세서 제목 에 변화 없이 통지, the 최근 날짜 시트 하십시오 접촉:

*주문을 받아서 사용할 수 있습니다

전기 연결

세라믹 압력센서 원리 - selamig ablyeogsenseo wonli

철사 색

기능

빨간

공급 +

검정

GND

황색

산출-

파랑

OUPUT +

*명세서 제목 에 변화 없이 통지, the 최근 날짜 시트 하십시오 접촉:

KR101573367B1 - 압저항형 세라믹 압력센서 - Google Patents

압저항형 세라믹 압력센서 Download PDF

Info

Publication numberKR101573367B1 KR101573367B1 KR1020140056514A KR20140056514A KR101573367B1 KR 101573367 B1 KR101573367 B1 KR 101573367B1 KR 1020140056514 A KR1020140056514 A KR 1020140056514A KR 20140056514 A KR20140056514 A KR 20140056514A KR 101573367 B1 KR101573367 B1 KR 101573367B1AuthorityKRSouth KoreaPrior art keywordsceramicdiaphragmpressure sensorceramic diaphragmpiezoresistivePrior art date2014-05-12Application numberKR1020140056514AOther languages English (en) Other versions KR20150129913A (koInventor조남규Original Assignee전자부품연구원Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)2014-05-12Filing date2014-05-12Publication date2015-12-03 2014-05-12 Application filed by 전자부품연구원 filed Critical 전자부품연구원 2014-05-12 Priority to KR1020140056514A priority Critical patent/KR101573367B1/ko 2015-11-23 Publication of KR20150129913A publication Critical patent/KR20150129913A/ko 2015-12-03 Application granted granted Critical 2015-12-03 Publication of KR101573367B1 publication Critical patent/KR101573367B1/ko

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  • 239000000919 ceramic Substances 0.000 title claims abstract description 126
  • XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound 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[Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 38
  • 229910052710 silicon Inorganic materials 0.000 claims abstract description 38
  • 239000010703 silicon Substances 0.000 claims abstract description 38
  • 239000000758 substrate Substances 0.000 claims abstract description 38
  • 230000000875 corresponding Effects 0.000 claims abstract description 5
  • 239000000853 adhesive Substances 0.000 claims description 16
  • 230000001070 adhesive Effects 0.000 claims description 16
  • 229910010293 ceramic material Inorganic materials 0.000 description 5
  • 231100000078 corrosive Toxicity 0.000 description 5
  • 231100001010 corrosive Toxicity 0.000 description 5
  • 239000000126 substance Substances 0.000 description 5
  • 238000004519 manufacturing process Methods 0.000 description 4
  • 229910052782 aluminium Inorganic materials 0.000 description 3
  • XAGFODPZIPBFFR-UHFFFAOYSA-N aluminum Chemical compound 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  • 238000007789 sealing Methods 0.000 description 3
  • PNEYBMLMFCGWSK-UHFFFAOYSA-N AI2O3 Inorganic materials 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[O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
  • 229910052802 copper Inorganic materials 0.000 description 2
  • RYGMFSIKBFXOCR-UHFFFAOYSA-N copper Chemical compound 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  • 239000010949 copper Substances 0.000 description 2
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  • VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound 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  • 229910052814 silicon oxide Inorganic materials 0.000 description 1
  • 229910052709 silver Inorganic materials 0.000 description 1
  • 239000004332 silver Substances 0.000 description 1
  • BQCADISMDOOEFD-UHFFFAOYSA-N silver Chemical compound 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[Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
  • 229910001220 stainless steel Inorganic materials 0.000 description 1
  • 239000010935 stainless steel Substances 0.000 description 1
  • 239000010409 thin film Substances 0.000 description 1

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type

Abstract

압저항형 세라믹 압력센서가 개시된다. 본 발명의 일 실시예에 따른 압저항형 세라믹 압력센서는 세라믹 다이어프램; 세라믹 다이어프램을 하부에서 지지하는 세라믹 지지기판; 및 세라믹 다이어프램의 중앙을 기준으로 세라믹 다이어프램의 하부면 양쪽에 각각 형성되는 압저항 방식의 실리콘 스트레인 게이지를 포함하고, 세라믹 지지기판은 실리콘 스트레인 게이지의 위치와 상응하는 위치에 홀이 형성된다.

Description

압저항형 세라믹 압력센서{PIEZORESISTIVE TYPED CERAMIC PRESSURE SENSOR}

본 발명은 압력센서에 관한 것으로, 보다 상세하게는 압저항형 압력센서에 관한 것이다.

압력센서는 하중, 무게, 압력 등의 기계량을 전기적 신호로 변환하는 것으로, 자동차, 항공기, 산업 공정, 사무자동화, 가전 전자 용품, 의료, 환경 제어 등 매우 다양한 분야에서 이용되고 있다.

압력센서는 그 원리에 따라 다양한 방식으로 구분될 수 있으나 크게는 다이어프램의 변형에 따른 정전용량 변화를 이용한 정전용량식 압력센서와 압전효과/압저항 효과를 이용한 압전/압저항식 압력센서로 분류된다.

정전용량식 압력센서는 다이어프램의 변형을 이용해 두 전극사이의 정전용량 변화를 검출하는 방식으로, 감도가 우수하고 안정성이 뛰어나다는 장점이 있다. 그러나 정전용량형 압력센서는 상대적으로 제조공정이 복잡하여 제조비용을 증가시키며, 직선성이 나쁘기 때문에 사용 가능한 압력범위가 좁다는 단점이 있다. 또한 정전용량 변화를 전압 형태의 전기적 신호로 변환하는 것은 기생 용량이 크므로 신호처리에 대한 부담이 크다는 단점이 있다.

그에 반해 압저항식 압력센서는 다이어프램을 형성한 후에 압력 변화에 따른 압저항값 변화를 이용하는 방식으로, 정전용량식 압력센서에 비해 구조가 간단하여 제조비용 측면에서 경쟁력을 가지며 사용 가능한 압력의 범위가 넓다는 장점을 갖는다. 압저항식 압력센서는 특허문헌 1에 개시되어 있다.

압저항식 압력센서는 압저항 방식의 실리콘 스트레인 게이지를 스테인리스 스틸과 같은 금속체로 형성된 다이어프램 상에 에폭시 등의 수지 접착제로 부착하는 형태를 가지는 것이 일반적이다.

그러나 이와 같이 금속체로 형성된 다이어프램을 구비하는 압저항식 압력센서의 경우에는 해수나 화학 약품과 같이 부식성이 있는 압력 매체에서는 사용한계를 갖는 단점이 있다.

특허문헌 1: 한국등록특허 제10-1015790호(2011.02.18 공고)

본 발명의 실시예들은 해수, 화학 약품과 같이 부식성 압력 매체에서도 사용 가능한 압저항형 세라믹 압력센서를 제공하고자 한다.

본 발명의 일 측면에 따르면, 세라믹 다이어프램; 상기 세라믹 다이어프램을 하부에서 지지하는 세라믹 지지기판; 및 상기 세라믹 다이어프램의 중앙을 기준으로 상기 세라믹 다이어프램의 하부면 양쪽에 각각 형성되는 압저항 방식의 실리콘 스트레인 게이지를 포함하고, 상기 세라믹 지지기판은 상기 실리콘 스트레인 게이지의 위치와 상응하는 위치에 홀이 형성되는 압저항형 세라믹 압력센서가 제공될 수 있다.

이 때, 상기 세라믹 지지기판은 상부면 중앙부에 홈이 형성되어, 상기 세라믹 다이어프램 및 세라믹 지지기판의 중앙부 사이에 갭이 형성될수 있다.

또한, 상기 세라믹 다이어프램의 양측 하부와 상기 세라믹 지지기판의 양측 상부에는 상기 세라믹 다이어프램 및 세라믹 지지기판을 상호 접착시키는 제1 접착층이 형성될 수 있다.

또한, 상기 세라믹 다이어프램과 상기 실리콘 스트레인 게이지 사이에는 상기 세라믹 다이어프램 및 실리콘 스트레인 게이지를 상호 접착시키는 제2 접착층이 형성될 수 있다.

또한, 상기 세라믹 지지기판의 하부면에는 복수의 전극이 형성되고, 상기 실리콘 스트레인 게이지는 상기 세라믹 지지기판에 형성된 홀을 통해 상기 전극들과 와이어본딩될 수 있다.

또한, 상기 각각의 실리콘 스트레인 게이지는 좌우대칭으로 형성된 하나의 칩에 두 개의 저항이 연결된 형태를 가질 수 있다.

본 발명의 실시예들에 따른 압저항형 세라믹 압력센서는 압저항형 압력센서가 정전용량형 압력센서에 대해 가지는 장점을 고스란히 가지면서도, 세라믹 소재로 형성되어 해수나 화학 약품과 같이 부식성 압력 매체에서도 사용 가능하므로 안정성이 우수하다.

또한, 세라믹 지지기판에는 실리콘 스트레인 게이지와 상응하는 홀을 형성함으로써, 실리콘 스트레인 게이지가 상기 홀을 통해 전극과 와이어본딩될 수 있어 구조가 간단하며 홀에 의해 지지기판의 중앙부에 스토퍼 기둥이 형성됨으로써 세라믹 소재의 다이어프램이 과대 압력으로 인해 파손되는 것을 방지할 수 있다.

도 1은 본 발명의 일 실시예에 따른 압저항형 세라믹 압력센서를 개략적으로 도시한 단면도이다.
도 2는 도 1의 압저항형 세라믹 압력센서에서 세라믹 다이어프램이 변형된 모습을 도시한 단면도이다.
도 3은 도 1의 압저항형 세라믹 압력센서의 회로 연결 형태를 개략적으로 도시한 도면이다.
도 4는 도 1의 압저항형 세라믹 압력센서를 포함하는 패키지를 개략적으로 도시한 단면도이다.

이하에서는 첨부된 도면을 참조하여 본 발명을 구체적으로 설명한다.

도 1은 본 발명의 일 실시예에 따른 압저항형 세라믹 압력센서(100, 이하 압력센서)를 개략적으로 도시한 단면도이다.

도 1을 참조하면, 압력센서(100)는 세라믹 다이어프램(110)과, 세라믹 다이어프램(110)을 하부에서 지지하는 세라믹 지지기판(120)과, 세라믹 다이어프램(110)의 하부면 양쪽에 각각 형성되는 실리콘 스트레인 게이지(130)를 포함한다.

세라믹 다이어프램(110)은 박막 형태로 제조되며 압력(기계적 에너지)을 받아 변형한다. 기존의 압저항형 압력센서에 있어 다이어프램은 금속 소재로 형성되는 것이 일반적이었으나, 본 실시예에 따른 압력센서(100)에서는 다이어프램(110)을 세라믹 소재로 형성함으로써 해수나 화학 약품과 같이 부식성이 있는 매체에서도 사용할 수 있다는 장점을 갖는다.

세라믹 다이어프램(110)의 소재로는 사파이어(sapphire), 알루미나(Al2O3) 등이 사용될 수 있으며, 두께는 특정되지 않는다.

세라믹 지지기판(120)은 세라믹 다이어프램(110)을 하부에서 지지하는 기능을 한다. 세라믹 지지기판(120)은 사각 박스 형태로 형성될 수 있으며, 세라믹 다이어프램(110)은 세라믹 지지기판(120)의 상부에 배치된다. 세라믹 지지기판(120)은 세라믹 소재(사파이어, 알루미나, 산화실리콘 등)로 형성됨으로써, 해수나 화학 약품과 같이 부식성이 있는 매체에서도 사용할 수 있다는 장점을 갖는다.

세라믹 지지기판(120)에는 두 개의 홀(123)이 형성될 수 있다. 구체적으로는 세라믹 지지기판(120)의 중앙을 기준으로 상기 중앙의 양 옆에 소정 간격을 두어 홀(123)들이 형성될 수 있다. 설명의 편의상 도 1을 기준으로, 좌측에 형성된 홀을 제1 홀(123a)라 하고, 우측에 형성된 홀을 제2 홀(123b)라고 한다. 홀(123a,123b)들은 실리콘 스트레인 게이지(130)를 전극과 전기적으로 연결시키기 위한 통로 역할을 하는 것으로, 이에 대해서는 후술하기로 한다.

세라믹 지지기판(120)은 양측부에 지지기둥(121)이 있으며, 중앙부에는 스톱퍼 기둥(122)이 있다. 지지기둥(121)과 스톱퍼 기둥(122) 사이에는 상술한 홀(123a 또는 123b)이 존재한다.

지지기둥(121)은 세라믹 다이어프램(110)을 지지한다. 즉 세라믹 다이어프램(110)의 양측 하부면이 세라믹 지지기판(120)의 지지기둥(121)의 상부면에 접착된다. 이 때 형성되는 접착층을 본 명세서에서는 제1 접착층(140)이라 한다. 제1 접착층(140)은 통상의 세라믹 접착제로 형성될 수 있는 바, 구체적인 설명은 생략한다.

세라믹 지지기판(120)은 상부면 중앙부에 아랫 방향으로 패인 형태를 갖는 홈(124)이 형성된다. 따라서 세라믹 다이어프램(110)의 중앙 하부면과 세라믹 지지기판(120)은 맞닿지 않도록 갭이 형성된다. 세라믹 다이어프램(110)이 과대 압력에 의해 아랫 방향으로 과하게 변형될 경우 파손의 우려가 있다. 세라믹 소재는 브리틀(brittle)한 성질을 갖기 때문이다. 이 때 세라믹 지지기판(120)의 스톱퍼 기둥(122)은 세라믹 다이어프램(110)의 과한 변형을 방지하는 기능을 한다. 예컨대 세라믹 다이어프램(110)이 아랫 방향으로 변형될 때 스톱퍼 기둥(122)에 의해 일정 수준 이상 변형되지 못한다. 따라서 세라믹 다이어프램(110)의 파손을 방지할 수 있다.

실리콘 스트레인 게이지(130)는 세라믹 다이어프램(110)의 하부면에 형성된다. 구체적으로는 세라믹 다이어프램(110)의 중앙을 기준으로 세라믹 다이어프램(110)의 하부면 양쪽에 간격을 두어 실리콘 스트레인 게이지(130)가 배치될 수 있다. 설명의 편의상 도 1을 기준으로, 좌측에 배치된 실리콘 스트레인 게이지(130)를 제1 게이지(131)라 칭하고, 우측에 배치된 실리콘 스트레인 게이지(130)를 제2 게이지(132)라 칭한다.

세라믹 지지기판(120)에 형성된 홀(123a,123b)의 위치는 실리콘 스트레인 게이지(130)의 위치와 상응한다. 즉, 제1 홀(123a)의 형성 위치는 제1 게이지(131)의 배치 위치와 상응하며, 제2 홀(123b)의 형성 위치는 제2 게이지(132)의 배치 위치와 상응한다.

실리콘 스트레인 게이지(130)는 압저항 방식으로써, 세라믹 다이어프램(110)의 변형에 따라 함께 변형을 일으키며 그 과정에서의 저항 변화(압저항 효과)를 이용하여 압력을 감지하는 기능을 한다. 이러한 실리콘 스트레인 게이지(130)는 통상적으로 사용되는 것이므로, 구체적인 설명은 생략한다. 본 실시예에서의 실리콘 스트레인 게이지(130)는 좌우대칭으로 형성된 하나의 칩에 두 개의 저항이 연결된 형태를 가질 수 있으며, 일 예시가 도 3에 도시되어 있다.

세라믹 다이어프램(110)과 실리콘 스트레인 게이지(130) 사이에는 이들을 상호 접착시키는 제2 접착층(150)이 형성된다. 제2 접착층(150)은 통상의 세라믹 접착제로 형성될 수 있는 바, 구체적인 설명을 생략한다. 제2 접착층(150)은 제1 접착층(140)과 동일하거나 다른 접착제가 이용될 수 있다.

이하, 압력센서(100)의 동작에 대해 설명한다.

도 2는 도 1의 압저항형 세라믹 압력센서(100, 이하 압력센서)에서 세라믹 다이어프램(110)이 변형된 모습을 도시한 단면도이다. 구체적으로 도 2에서는 세라믹 다이어프램(110)이 기계적 에너지에 의해 아랫방향으로 변형을 일으킨 모습을 도시하고 있다.

도 2를 참고하면 세라믹 다이어프램(110)의 윗 방향에서 아랫방향으로 기계적 에너지(기계적 힘, 압력)가 가해지면 세라믹 다이어프램(110)의 중앙부가 아랫방향으로 처진 형태를 갖도록 변형이 일어난다. 세라믹 다이어프램(110)의 양측부는 세라믹 지지기판(120)의 지지기둥(121)에 의해 지지되므로 변형이 상대적으로 적게 일어난다.

세라믹 지지기판(120)의 상부면 중앙부에는 홈(124)이 형성되 세라믹 다이어프램(110) 및 세라믹 지지기판(120)의 중앙부 사이에 갭(gap)이 형성되어 있으므로 가해지는 기계적 에너지의 크기에 비례하여 세라믹 다이어프램(110)의 중앙부가 아랫방향으로 처지게 된다. 이 때, 가해지는 기계적 에너지가 특정값을 넘어서게 되면 세라믹 다이어프램(110)이 과도하게 변형을 일으키게 되어 파손될 우려가 있으나, 세라믹 지지기판(120)의 중앙부에는 상술하였듯이 스톱퍼 기둥(122)이 존재하는 바, 스톱퍼 기둥(122)이 세라믹 다이어프램(110)의 중앙부를 아랫 방향에서 지지하므로 세라믹 다이어프램(110)이 과도한 변형에 의해 파손될 가능성이 적어진다.

세라믹 다이어프램(110)이 변형을 일으키면 세라믹 다이어프램(110)의 하부면에 배치되어 있는 실리콘 스트레인 게이지(130) 역시 변형을 일으킨다.

도 2에서와 같이 세라믹 다이어프램(110)이 변형을 일으킬 때, 세라믹 다이어프램(110)의 상부 표면의 중심부에서는 최대 압축응력이 발생하고 가장자리 쪽으로 갈수록 압축응력의 크기가 감소한다. 즉 중심부와 가장자리의 중간 정도에서 응력이 영(zero)이 되고 가장자리 쪽으로 더 갈수록 압축응력이 증가하여 가장자리에서 최대 인장응력이 발생한다.

세라믹 다이어프램(110)의 하부 표면은 이와는 반대다. 즉 세라믹 다이어프램(110)의 하부 표면의 중심부에서 최대 인장응력이 발생하고 가장자리 쪽으로 갈수록 인장응력의 크기가 감소하는데 중심부와 가장자리의 중간 정도에서 응력이 영(zero)이 되고 가장자리 쪽으로 더 갈수록 압축응력이 증가하여 가장자리에서 최대 압축응력이 발생한다.

이 때 실리콘 스트레인 게이지(130)는 세라믹 다이어프램(110)이 변형함에 따라 함께 변형을 일으킨다. 예컨대 도 2에서와 같이 세라믹 다이어프램(110)이 아랫 방향으로 처지는 형태를 갖도록 변형을 일으킬 때, 제1 게이지(131)의 우측 부분(L1을 기준으로 함)과 제2 게이지(132)의 좌측 부분(L2를 기준으로 함)은 인장응력으로 인해 저항이 증가한다. 그리고 제1 게이지(131)의 좌측 부분(L1을 기준으로 함)과 제2 게이지(132)의 우측 부분(L2를 기준으로 함)은 압축응력으로 인해 저항이 감소한다. 따라서 제1,2 게이지(131,132)의 저항 변화를 통합하여 전기적 신호로 변환하는 경우에는 압력을 측정할 수 있다.

예컨대 도 3에서는 도 1의 압저항형 세라믹 압력센서(100)의 회로 연결 형태를 개략적으로 도시하고 있으며(도 3은 도 1의 압력센서(100)를 아랫 방향에서 도시한 모양을 개략적으로 도시하고 있음), 도 3을 참조하면, 제1 게이지(131) 및 제2 게이지(132)가 풀 브릿지(full bridge)형태로 연결되고 있음을 확인할 수 있다. 스트레인 게이지(strain gauge)의 변형을 통한 압력 측정은 본 기술분야에서는 일반적인 내용이므로 구체적인 설명은 생략한다.

이하, 압력센서(100)를 포함하는 패키지(200)에 대해 설명한다.

도 4는 도 1의 압저항형 세라믹 압력센서(100, 이하 압력센서)를 포함하는 패키지(200)를 개략적으로 도시한 단면도이다.

도 4를 참조하면, 패키지(200)는 상부 하우징(210)과 하부 하우징(220)이 결합된 형태를 가지며, 일 예로는 도 4에서와 같이 하부 하우징(220)의 상부측이 상부 하우징(210)의 내부에 수용되는 형태로 결합될 수 있다. 그리고 상부 하우징(210)과 하부 하우징(220)이 이루는 공간에 압력센서(100)가 배치될 수 있다. 압력센서(100)의 위치 고정 및 실링을 위해 실링고무(211)들이 필요한 곳에 배치될 수 있다.

압력센서(100)에서 세라믹 지지기판(120)의 하부면에는 복수의 전극(160)이 형성되고, 실리콘 스트레인 게이지(130)는 세라믹 지지기판(120)에 형성된 홀(123a,123b)을 통해 전극들(160)과 와이어본딩될 수 있다.

전극(160)은 은, 니켈, 구리, 납, 금, 알루미늄 등의 금속으로 형성될 수 있으며, 실리콘 스트레인 게이지(130)는 전극(160)에 알루미늄 와이어 또는 금 와이어(도면부호 170으로 표기함)를 통해 와이어 본딩될 수 있다. 이 때 세라믹 지지기판(120)에는 실리콘 스트레인 게이지(130)의 배치 위치와 상응하도록 홀(123a,123b)이 형성되어 있으므로, 상기 와이어(170)들은 홀(123a,123b)들을 통해 실리콘 스트레인 게이지(130)로부터 전극(160)까지 연장될 수 있다.

하부 하우징(220)에는 커넥터 단자(221)가 배치되며 전극(160)은 커넥터 단자(221)와 알루미늄 또는 구리 도선(도면부호 180으로 표기함)으로 연결될 수 있다. 즉 세라믹 지지기판(120)에 형성된 홀(123a,123b)로 인해 실리콘 스트레인 게이지(130), 전극(160) 및 커넥터 단자(221)의 전기적 연결이 간단하고 간편하게 이루어질 수 있다는 장점을 갖는다.

상술한 바와 같이, 본 발명의 실시예들에 따른 압저항형 세라믹 압력센서(100)는 압저항형 압력센서가 정전용량형 압력센서에 대해 가지는 장점(구조적으로 간단함)을 고스란히 가지면서도, 세라믹 소재로 형성되어 해수나 화학 약품과 같이 부식성 압력 매체에서도 사용 가능하므로 안정성이 우수하다.

또한, 세라믹 지지기판(120)에는 실리콘 스트레인 게이지(130)와 상응하는 홀(123)을 형성함으로써, 실리콘 스트레인 게이지(130)가 상기 홀(123)을 통해 전극(160)과 와이어본딩될 수 있어 구조가 간단하며 홀(123)에 의해 지지기판(120)의 중앙부에 스토퍼 기둥(122)이 형성됨으로써 세라믹 소재의 다이어프램(110)이 과대 압력으로 인해 파손되는 것을 방지할 수 있다.

이상, 본 발명의 실시예들에 대하여 설명하였다. 그러나 본 발명이 속하는 기술분야에서 통상의 지식을 가진 자라면 특허청구범위에 기재된 본 발명의 기술적 사상의 범위 내에서 기술의 구체적 적용에 따른 단순한 설계변경, 일부 구성요소의 생략, 단순한 용도의 변경 등의 형태로 본 발명을 다양하게 변형할 수 있을 것이며, 이 또한 본 발명의 권리범위 내에 포함됨은 자명하다.

100: 압저항형 세라믹 압력센서 110: 세라믹 다이어프램
120: 세라믹 지지기판 121: 지지기둥
122: 스톱퍼 기둥 123: 홀
123a: 제1 홀 123b: 제2 홀
124: 홈 130: 실리콘 스트레인 게이지
131: 제1 게이지 132: 제2 게이지
140: 제1 접착층 150: 제2 접착층
160: 전극 170: 와이어
180: 도선 200: 패키지
210: 상부하우징 211: 실링고무
220: 하부하우징 221: 커넥터 단자

Claims (6)

  1. 세라믹 다이어프램;
    상기 세라믹 다이어프램을 하부에서 지지하는 세라믹 지지기판; 및
    상기 세라믹 다이어프램의 중앙을 기준으로 상기 세라믹 다이어프램의 하부면 양쪽에 각각 형성되는 압저항 방식의 실리콘 스트레인 게이지를 포함하고,
    상기 세라믹 지지기판은 상기 실리콘 스트레인 게이지의 위치와 상응하는 위치에 홀이 형성되며,
    상기 세라믹 지지기판은 상부면 중앙부에 홈이 형성되어, 상기 세라믹 다이어프램 및 세라믹 지지기판의 중앙부 사이에 상기 세라믹 다이어프램의 중앙 하부과 상기 세라믹 지지기판이 맞닿지 않도록 갭이 형성되고, 상기 세라믹 다이어프램의 변형을 제한하는 스톱퍼 기둥을 포함하는 압저항형 세라믹 압력센서.

  3. 청구항 1에 있어서,
    상기 세라믹 다이어프램의 양측 하부와 상기 세라믹 지지기판의 양측 상부에는 상기 세라믹 다이어프램 및 세라믹 지지기판을 상호 접착시키는 제1 접착층이 형성되는 압저항형 세라믹 압력센서.

  4. 청구항 1 또는 청구항 3에 있어서,
    상기 세라믹 다이어프램과 상기 실리콘 스트레인 게이지 사이에는 상기 세라믹 다이어프램 및 실리콘 스트레인 게이지를 상호 접착시키는 제2 접착층이 형성되는 압저항형 세라믹 압력센서.

  5. 청구항 1에 있어서,
    상기 세라믹 지지기판의 하부면에는 복수의 전극이 형성되고, 상기 실리콘 스트레인 게이지는 상기 세라믹 지지기판에 형성된 홀을 통해 상기 전극들과 와이어본딩되는 압저항형 세라믹 압력센서.

  6. 청구항 1에 있어서,
    상기 각각의 실리콘 스트레인 게이지는 좌우대칭으로 형성된 하나의 칩에 두 개의 저항이 연결된 형태를 갖는 압저항형 세라믹 압력센서.

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KR101380282B1 (ko) 2012-03-06 2014-04-02 경북대학교 산학협력단 벌크 실리콘 스트레인 게이지, 물리 센서 및 벌크 실리콘 스트레인 게이지의 제조 방법
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